Scheduling single-armed cluster tools with chamber cleaning operations TS Yu, HJ Kim, TE Lee IEEE Transactions on Automation Science and Engineering 15 (2), 705-716, 2017 | 43 | 2017 |
Scheduling dual-armed cluster tools with chamber cleaning operations TS Yu, TE Lee IEEE transactions on automation science and engineering 16 (1), 218-228, 2017 | 30 | 2017 |
Semiconductor manufacturing automation TE Lee, HJ Kim, TS Yu Springer Handbook of Automation, 841-863, 2023 | 22 | 2023 |
Minimization of waiting time variation in a generalized two-machine flowshop with waiting time constraints and skipping jobs TS Yu, HJ Kim, TE Lee IEEE Transactions on Semiconductor Manufacturing 30 (2), 155-165, 2017 | 21 | 2017 |
Scheduling proportionate flow shops with preventive machine maintenance TS Yu, JH Han International Journal of Production Economics 231, 107874, 2021 | 18 | 2021 |
Scheduling dual-armed cluster tools for concurrent processing of multiple wafer types with identical job flows SG Ko, TS Yu, TE Lee IEEE Transactions on Automation Science and Engineering 16 (3), 1058-1070, 2018 | 18 | 2018 |
Flow shops with reentry: Reversibility properties and makespan optimal schedules TS Yu, M Pinedo European Journal of Operational Research 282 (2), 478-490, 2020 | 17 | 2020 |
Wafer delay analysis and workload balancing of parallel chambers for dual-armed cluster tools with multiple wafer types SG Ko, TS Yu, TE Lee IEEE Transactions on Automation Science and Engineering 18 (3), 1516-1526, 2021 | 16 | 2021 |
Wafer delay analysis and control of dual-armed cluster tools with chamber cleaning operations TS Yu, TE Lee International Journal of Production Research 58 (2), 434-447, 2020 | 14 | 2020 |
A new class of sequences without interferences for cluster tools with tight wafer delay constraints Y Lim, TS Yu, TE Lee IEEE Transactions on Automation Science and Engineering 16 (1), 392-405, 2018 | 14 | 2018 |
Adaptive scheduling of cluster tools with wafer delay constraints and process time variation Y Lim, TS Yu, TE Lee IEEE Transactions on Automation Science and Engineering 17 (1), 375-388, 2019 | 13 | 2019 |
Two-stage lot scheduling with waiting time constraints and due dates TS Yu, HJ Kim, C Jung, TE Lee 2013 Winter Simulations Conference (WSC), 3630-3641, 2013 | 9 | 2013 |
Integrated scheduling of a dual-armed cluster tool for maximizing steady schedule patterns W Kim, TS Yu, TE Lee IEEE Transactions on Systems, Man, and Cybernetics: Systems 51 (12), 7282-7294, 2020 | 7 | 2020 |
Reachability tree-based optimization algorithm for cyclic scheduling of timed Petri nets C Kim, TS Yu, TE Lee IEEE Transactions on Automation Science and Engineering 18 (3), 1441-1452, 2020 | 6 | 2020 |
Feedback control of cluster tools: Stability against random time disruptions C Kim, TS Yu, TE Lee IEEE Transactions on Automation Science and Engineering 19 (3), 2008-2015, 2021 | 4 | 2021 |
Cleaning plan optimization for dual-armed cluster tools with general chamber cleaning periods TG Lee, TS Yu, TE Lee IEEE Transactions on Automation Science and Engineering, 2022 | 3 | 2022 |
Optimization for robot operations in cluster tools for concurrent manufacturing of multiple wafer types TS Yu, JH Lee, SG Ko Journal of Industrial Technology 43 (1), 49-55, 2023 | | 2023 |