| Microfabrication of 3D silicon MEMS structures using gray-scale lithography and deep reactive ion etching CM Waits, B Morgan, M Kastantin, R Ghodssi Sensors and Actuators A: Physical 119 (1), 245-253, 2005 | 274 | 2005 |
| Investigation of gray-scale technology for large area 3D silicon MEMS structures CM Waits, A Modafe, R Ghodssi Journal of Micromechanics and Microengineering 13 (2), 170, 2002 | 212 | 2002 |
| Development of a deep silicon phase Fresnel lens using gray-scale lithography and deep reactive ion etching B Morgan, CM Waits, J Krizmanic, R Ghodssi Journal of microelectromechanical systems 13 (1), 113-120, 2004 | 185 | 2004 |
| Compact multiplexing of monodisperse electrosprays W Deng, CM Waits, B Morgan, A Gomez Journal of Aerosol Science 40 (10), 907-918, 2009 | 110 | 2009 |
| Chalcogenide glass e-beam and photoresists for ultrathin grayscale patterning A Kovalskiy, J Cech, M Vlcek, CM Waits, M Dubey, WR Heffner, H Jain Journal of Micro/Nanolithography, MEMS and MOEMS 8 (4), 043012-043012-11, 2009 | 81 | 2009 |
| Double-exposure grayscale photolithography L Mosher, CM Waits, B Morgan, R Ghodssi Journal of microelectromechanical systems 18 (2), 308-315, 2009 | 77 | 2009 |
| Development of chalcogenide glass photoresists for gray scale lithography A Kovalskiy, M Vlcek, H Jain, A Fiserova, CM Waits, M Dubey Journal of non-crystalline solids 352 (6-7), 589-594, 2006 | 57 | 2006 |
| Dynamic friction and wear in a planar-contact encapsulated microball bearing using an integrated microturbine M McCarthy, CM Waits, R Ghodssi Journal of Microelectromechanical Systems 18 (2), 263-273, 2009 | 56 | 2009 |
| Encapsulated ball bearings for rotary micro machines CM Waits, B Geil, R Ghodssi Journal of Micromechanics and Microengineering 17 (9), S224, 2007 | 44 | 2007 |
| MEMS-based gray-scale lithography CM Waits, R Ghodssi, MH Ervin, M Dubey 2001 International Semiconductor Device Research Symposium. Symposium …, 2001 | 40 | 2001 |
| A rotary microactuator supported on encapsulated microball bearings using an electro-pneumatic thrust balance M McCarthy, CM Waits, MI Beyaz, R Ghodssi Journal of Micromechanics and Microengineering 19 (9), 094007, 2009 | 36 | 2009 |
| A microfabricated spiral-groove turbopump supported on microball bearings CM Waits, M McCarthy, R Ghodssi Journal of microelectromechanical systems 19 (1), 99-109, 2009 | 29 | 2009 |
| Analysis of a high throughput n-dodecane fueled heterogeneous/homogeneous parallel plate microreactor for portable power conversion ED Tolmachoff, W Allmon, CM Waits Applied energy 128, 111-118, 2014 | 27 | 2014 |
| Catalytic combustion of alcohols for microburner applications DA Behrens, IC Lee, CM Waits Journal of Power Sources 195 (7), 2008-2013, 2010 | 26 | 2010 |
| Digital electrospray for controlled deposition W Deng, CM Waits, A Gomez Review of Scientific Instruments 81 (3), 2010 | 24 | 2010 |
| Improved pyroelectric performance for thin film lead zirconate titanate (PZT) capacitors with IrO2 electrodes B Hanrahan, L Sanchez, CM Waits, RG Polcawich Smart Materials and Structures 25 (1), 015025, 2015 | 18 | 2015 |
| On the mechanism of gray scale patterning of Ag-containing As2S3 thin films A Kovalskiy, H Jain, J Neilson, M Vlcek, CM Waits, W Churaman, ... Journal of Physics and Chemistry of Solids 68 (5-6), 920-925, 2007 | 18 | 2007 |
| Compensated aspect ratio dependent etching (CARDE) using gray-scale technology B Morgan, CM Waits, R Ghodssi microelectronic engineering 77 (1), 85-94, 2005 | 18 | 2005 |
| Wireless power transmission via modulated laser irradiation of pyroelectric thin films B Hanrahan, C Neville, A Smith, N Ter‐Gabrielyan, N Jankowski, ... Advanced Materials Technologies 1 (9), 1600178, 2016 | 17 | 2016 |
| Multiplexed electrospray scaling for liquid fuel injection CM Waits, B Hanrahan, I Lee Journal of Micromechanics and Microengineering 20 (10), 104010, 2010 | 17 | 2010 |
Brendan HanrahanU.S. Army Research LaboratoryVerifierad e-postadress på mail.mil
