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Berenschot
Berenschot
MESA+ Institute for Nanotechnology, University of Twente
Verifierad e-postadress på utwente.nl
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Silicon micromachined hollow microneedles for transdermal liquid transport
HJGE Gardeniers, R Luttge, EJW Berenschot, MJ De Boer, SY Yeshurun, ...
Journal of Microelectromechanical systems 12 (6), 855-862, 2003
5862003
Micromachining of buried micro channels in silicon
MJ de Boer, RW Tjerkstra, JW Berenschot, HV Jansen, GJ Burger, ...
Journal of Microelectromechanical systems 9 (1), 94-103, 2000
3192000
Silicon nitride nanosieve membrane
HD Tong, HV Jansen, VJ Gadgil, CG Bostan, E Berenschot, CJM van Rijn, ...
Nano letters 4 (2), 283-287, 2004
3162004
Microneedle structure and production method therefor
Y Yeshurun, M Hefetz, M De Boer, JW Berenschot, JGE Gardeniers
US Patent 6,533,949, 2003
2632003
Capillarity induced negative pressure of water plugs in nanochannels
NR Tas, P Mela, T Kramer, JW Berenschot, A van den Berg
Nano letters 3 (11), 1537-1540, 2003
2532003
Resistless patterning of sub-micron structures by evaporation through nanostencils
J Brugger, JW Berenschot, S Kuiper, W Nijdam, B Otter, M Elwenspoek
Microelectronic engineering 53 (1-4), 403-405, 2000
1852000
A micromachined pressure/flow-sensor
RE Oosterbroek, TSJ Lammerink, JW Berenschot, GJM Krijnen, ...
Sensors and Actuators A: Physical 77 (3), 167-177, 1999
1571999
High resolution powder blast micromachining
H Wensink, JW Berenschot, HV Jansen, MC Elwenspoek
Proceedings IEEE Thirteenth Annual International Conference on Micro Electro …, 2000
1432000
Spatial decoupling of light absorption and catalytic activity of Ni–Mo-loaded high-aspect-ratio silicon microwire photocathodes
W Vijselaar, P Westerik, J Veerbeek, RM Tiggelaar, E Berenschot, NR Tas, ...
Nature Energy 3 (3), 185-192, 2018
1372018
Wet anisotropic etching for fluidic 1D nanochannels
J Haneveld, H Jansen, E Berenschot, N Tas, M Elwenspoek
Journal of micromechanics and microengineering 13 (4), S62, 2003
1332003
2D-confined nanochannels fabricated by conventional micromachining
NR Tas, JW Berenschot, P Mela, HV Jansen, M Elwenspoek, ...
Nano Letters 2 (9), 1031-1032, 2002
1172002
Miniaturized thermal flow sensor with planar-integrated sensor structures on semicircular surface channels
M Dijkstra, MJ de Boer, JW Berenschot, TSJ Lammerink, RJ Wiegerink, ...
Sensors and Actuators A: Physical 143 (1), 1-6, 2008
1062008
Micromachined fountain pen for atomic force microscope-based nanopatterning
S Deladi, NR Tas, JW Berenschot, GJM Krijnen, MJ de Boer, JH De Boer, ...
Applied physics letters 85 (22), 5361-5363, 2004
1062004
Mask materials for powder blasting
H Wensink, HV Jansen, JW Berenschot, MC Elwenspoek
Journal of micromechanics and microengineering 10 (2), 175, 2000
1032000
Selective area growth and stencil lithography for in situ fabricated quantum devices
P Schüffelgen, D Rosenbach, C Li, TW Schmitt, M Schleenvoigt, AR Jalil, ...
Nature nanotechnology 14 (9), 825-831, 2019
992019
Etching methodologies in< 111>-oriented silicon wafers
RE Oosterbroek, JW Berenschot, HV Jansen, AJ Nijdam, G Pandraud, ...
Journal of microelectromechanical systems 9 (3), 390-398, 2000
932000
High-resolution shadow-mask patterning in deep holes and its application to an electrical wafer feed-through
GJ Burger, EJT Smulders, JW Berenschot, TSJ Lammerink, JHJ Fluitman, ...
Sensors and Actuators A: Physical 54 (1-3), 669-673, 1996
921996
Fabrication of a high-temperature microreactor with integrated heater and sensor patterns on an ultrathin silicon membrane
RM Tiggelaar, P Van Male, JW Berenschot, JGE Gardeniers, ...
Sensors and Actuators A: Physical 119 (1), 196-205, 2005
892005
Modeling, design and testing of the electrostatic shuffle motor
N Tas, J Wissink, L Sander, T Lammerink, M Elwenspoek
Sensors and Actuators A: Physical 70 (1-2), 171-178, 1998
881998
Fabrication of 3D fractal structures using nanoscale anisotropic etching of single crystalline silicon
EJW Berenschot, HV Jansen, NR Tas
Journal of micromechanics and microengineering 23 (5), 055024, 2013
842013
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Artiklar 1–20