MESA+ Institute for Nanotechnology, University of Twente
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Silicon micromachined hollow microneedles for transdermal liquid transport
HJGE Gardeniers, R Luttge, EJW Berenschot, MJ De Boer, SY Yeshurun, ...
Journal of Microelectromechanical systems 12 (6), 855-862, 2003
Micromachining of buried micro channels in silicon
MJ de Boer, RW Tjerkstra, JW Berenschot, HV Jansen, GJ Burger, ...
Journal of Microelectromechanical systems 9 (1), 94-103, 2000
Silicon nitride nanosieve membrane
HD Tong, HV Jansen, VJ Gadgil, CG Bostan, E Berenschot, CJM van Rijn, ...
Nano letters 4 (2), 283-287, 2004
Microneedle structure and production method therefor
Y Yeshurun, M Hefetz, M De Boer, JW Berenschot, JGE Gardeniers
US Patent 6,533,949, 2003
Capillarity induced negative pressure of water plugs in nanochannels
NR Tas, P Mela, T Kramer, JW Berenschot, A van den Berg
Nano letters 3 (11), 1537-1540, 2003
Resistless patterning of sub-micron structures by evaporation through nanostencils
J Brugger, JW Berenschot, S Kuiper, W Nijdam, B Otter, M Elwenspoek
Microelectronic engineering 53 (1-4), 403-405, 2000
A micromachined pressure/flow-sensor
RE Oosterbroek, TSJ Lammerink, JW Berenschot, GJM Krijnen, ...
Sensors and Actuators A: Physical 77 (3), 167-177, 1999
High resolution powder blast micromachining
H Wensink, JW Berenschot, HV Jansen, MC Elwenspoek
Proceedings IEEE Thirteenth Annual International Conference on Micro Electro …, 2000
Spatial decoupling of light absorption and catalytic activity of Ni–Mo-loaded high-aspect-ratio silicon microwire photocathodes
W Vijselaar, P Westerik, J Veerbeek, RM Tiggelaar, E Berenschot, NR Tas, ...
Nature Energy 3 (3), 185-192, 2018
Wet anisotropic etching for fluidic 1D nanochannels
J Haneveld, H Jansen, E Berenschot, N Tas, M Elwenspoek
Journal of micromechanics and microengineering 13 (4), S62, 2003
2D-confined nanochannels fabricated by conventional micromachining
NR Tas, JW Berenschot, P Mela, HV Jansen, M Elwenspoek, ...
Nano Letters 2 (9), 1031-1032, 2002
Miniaturized thermal flow sensor with planar-integrated sensor structures on semicircular surface channels
M Dijkstra, MJ de Boer, JW Berenschot, TSJ Lammerink, RJ Wiegerink, ...
Sensors and Actuators A: Physical 143 (1), 1-6, 2008
Micromachined fountain pen for atomic force microscope-based nanopatterning
S Deladi, NR Tas, JW Berenschot, GJM Krijnen, MJ de Boer, JH De Boer, ...
Applied physics letters 85 (22), 5361-5363, 2004
Mask materials for powder blasting
H Wensink, HV Jansen, JW Berenschot, MC Elwenspoek
Journal of micromechanics and microengineering 10 (2), 175, 2000
Selective area growth and stencil lithography for in situ fabricated quantum devices
P Schüffelgen, D Rosenbach, C Li, TW Schmitt, M Schleenvoigt, AR Jalil, ...
Nature nanotechnology 14 (9), 825-831, 2019
Etching methodologies in< 111>-oriented silicon wafers
RE Oosterbroek, JW Berenschot, HV Jansen, AJ Nijdam, G Pandraud, ...
Journal of microelectromechanical systems 9 (3), 390-398, 2000
High-resolution shadow-mask patterning in deep holes and its application to an electrical wafer feed-through
GJ Burger, EJT Smulders, JW Berenschot, TSJ Lammerink, JHJ Fluitman, ...
Sensors and Actuators A: Physical 54 (1-3), 669-673, 1996
Fabrication of a high-temperature microreactor with integrated heater and sensor patterns on an ultrathin silicon membrane
RM Tiggelaar, P Van Male, JW Berenschot, JGE Gardeniers, ...
Sensors and Actuators A: Physical 119 (1), 196-205, 2005
Modeling, design and testing of the electrostatic shuffle motor
N Tas, J Wissink, L Sander, T Lammerink, M Elwenspoek
Sensors and Actuators A: Physical 70 (1-2), 171-178, 1998
Fabrication of 3D fractal structures using nanoscale anisotropic etching of single crystalline silicon
EJW Berenschot, HV Jansen, NR Tas
Journal of micromechanics and microengineering 23 (5), 055024, 2013
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