Joe Greene
Joe Greene
Professor of Materials Science and Physics, University of Illinois
Verified email at uiuc.edu
Title
Cited by
Cited by
Year
Microstructural evolution during film growth
I Petrov, PB Barna, L Hultman, JE Greene
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 21 (5 …, 2003
17832003
Growth of single‐crystal TiN/VN strained‐layer superlattices with extremely high mechanical hardness
U Helmersson, S Todorova, SA Barnett, JE Sundgren, LC Markert, ...
Journal of Applied Physics 62 (2), 481-484, 1987
8801987
Oxidation of metastable single‐phase polycrystalline Ti0.5Al0.5N films: Kinetics and mechanisms
D McIntyre, JE Greene, G Håkansson, JE Sundgren, WD Münz
Journal of Applied Physics 67 (3), 1542-1553, 1990
6171990
Heteroepitaxial wurtzite and zinc‐blende structure GaN grown by reactive‐ion molecular‐beam epitaxy: Growth kinetics, microstructure, and properties
RC Powell, NE Lee, YW Kim, JE Greene
Journal of applied physics 73 (1), 189-204, 1993
5681993
Size-dependent melting point depression of nanostructures: Nanocalorimetric measurements
M Zhang, MY Efremov, F Schiettekatte, EA Olson, AT Kwan, SL Lai, ...
Physical Review B 62 (15), 10548, 2000
5192000
Development of preferred orientation in polycrystalline TiN layers grown by ultrahigh vacuum reactive magnetron sputtering
JE Greene, JE Sundgren, L Hultman, I Petrov, DB Bergstrom
Applied physics letters 67 (20), 2928-2930, 1995
3891995
Properties and microelectronic applications of thin films of refractory metal nitrides
M Wittmer
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 3 (4 …, 1985
3471985
Pathways of atomistic processes on TiN(001) and (111) surfaces during film growth: an ab initio study
D Gall, S Kodambaka, MA Wall, I Petrov, JE Greene
Journal of Applied Physics 93 (11), 9086-9094, 2003
3392003
Microstructure modification of TiN by ion bombardment during reactive sputter deposition
I Petrov, L Hultman, U Helmersson, JE Sundgren, JE Greene
Thin Solid Films 169 (2), 299-314, 1989
3371989
Temperature-dependent optical band gap of the metastable zinc-blende structure β-GaN
G Ramirez-Flores, H Navarro-Contreras, A Lastras-Martinez, RC Powell, ...
Physical Review B 50 (12), 8433, 1994
2721994
Microstructure and physical properties of polycrystalline metastable Ti0. 5Al0. 5N alloys grown by dc magnetron sputter deposition
G Håkansson, JE Sundgren, D McIntyre, JE Greene, WD Münz
Thin solid films 153 (1-3), 55-65, 1987
2661987
High‐flux low‐energy (≂20 eV) N+2 ion irradiation during TiN deposition by reactive magnetron sputtering: Effects on microstructure and preferred orientation
L Hultman, JE Sundgren, JE Greene, DB Bergstrom, I Petrov
Journal of Applied Physics 78 (9), 5395-5403, 1995
2631995
Nanoindentation studies of single‐crystal (001)‐,(011)‐, and (111)‐oriented TiN layers on MgO
H Ljungcrantz, M Odén, L Hultman, JE Greene, JE Sundgren
Journal of applied physics 80 (12), 6725-6733, 1996
2611996
Crystal growth and microstructure of polycrystalline Ti1− xAlxN alloy films deposited by ultra-high-vacuum dual-target magnetron sputtering
U Wahlström, L Hultman, JE Sundgren, F Adibi, I Petrov, JE Greene
Thin Solid Films 235 (1-2), 62-70, 1993
2581993
Synthesis of metastable epitaxial zinc‐blende‐structure AlN by solid‐state reaction
I Petrov, E Mojab, RC Powell, JE Greene, L Hultman, JE Sundgren
Applied physics letters 60 (20), 2491-2493, 1992
2531992
Polycrystalline TiN films deposited by reactive bias magnetron sputtering: Effects of ion bombardment on resputtering rates, film composition, and microstructure
I Petrov, L Hultman, JE Sundgren, JE Greene
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 10 (2 …, 1992
2431992
Pathway for the strain-driven two-dimensional to three-dimensional transition during growth of Ge on Si (001)
A Vailionis, B Cho, G Glass, P Desjardins, DG Cahill, JE Greene
Physical review letters 85 (17), 3672, 2000
2402000
Average energy deposited per atom: A universal parameter for describing ion‐assisted film growth?
I Petrov, F Adibi, JE Greene, L Hultman, JE Sundgren
Applied physics letters 63 (1), 36-38, 1993
2381993
Growth and properties of single crystal TiN films deposited by reactive magnetron sputtering
BO Johansson, JE Sundgren, JE Greene, A Rockett, SA Barnett
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 3 (2 …, 1985
2381985
Surface morphology during multilayer epitaxial growth of Ge (001)
JE Van Nostrand, SJ Chey, MA Hasan, DG Cahill, JE Greene
Physical review letters 74 (7), 1127, 1995
2331995
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