M.J. de Boer (Meint)
M.J. de Boer (Meint)
Mesa+ Institute for Nanotechnology - University of Twente
Verifierad e-postadress på utwente.nl - Startsida
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The black silicon method: a universal method for determining the parameter setting of a fluorine-based reactive ion etcher in deep silicon trench etching with profile control
H Jansen, M de Boer, R Legtenberg, M Elwenspoek
Journal of Micromechanics and Microengineering 5 (2), 115, 1995
A survey on the reactive ion etching of silicon in microtechnology
H Jansen, H Gardeniers, M de Boer, M Elwenspoek, J Fluitman
Journal of micromechanics and microengineering 6 (1), 14, 1996
Silicon micromachined hollow microneedles for transdermal liquid transport
HJGE Gardeniers, R Luttge, EJW Berenschot, MJ De Boer, SY Yeshurun, ...
Journal of Microelectromechanical systems 12 (6), 855-862, 2003
Black silicon method X: a review on high speed and selective plasma etching of silicon with profile control: an in-depth comparison between Bosch and cryostat DRIE processes as …
HV Jansen, MJ De Boer, S Unnikrishnan, MC Louwerse, MC Elwenspoek
Journal of micromechanics and microengineering 19 (3), 033001, 2009
Micromachining of buried micro channels in silicon
MJ de Boer, RW Tjerkstra, JW Berenschot, HV Jansen, GJ Burger, ...
Journal of Microelectromechanical systems 9 (1), 94-103, 2000
Guidelines for etching silicon MEMS structures using fluorine high-density plasmas at cryogenic temperatures
MJ De Boer, JGE Gardeniers, HV Jansen, E Smulders, MJ Gilde, ...
Journal of microelectromechanical systems 11 (4), 385-401, 2002
Anisotropic reactive ion etching of silicon using SF 6/O 2/CHF 3 gas mixtures
R Legtenberg, H Jansen, M de Boer, M Elwenspoek
Journal of the electrochemical society 142 (6), 2020, 1995
Microneedle structure and production method therefor
Y Yeshurun, M Hefetz, M De Boer, JW Berenschot, JGE Gardeniers
US Patent 6,533,949, 2003
BSM 7: RIE lag in high aspect ratio trench etching of silicon
H Jansen, M de Boer, R Wiegerink, N Tas, E Smulders, C Neagu, ...
Microelectronic Engineering 35 (1-4), 45-50, 1997
The black silicon method II: The effect of mask material and loading on the reactive ion etching of deep silicon trenches
H Jansen, M de Boer, J Burger, R Legtenberg, M Elwenspoek
Microelectronic engineering 27 (1-4), 475-480, 1995
Scanning electron microscopic, transmission electron microscopic, and confocal laser scanning microscopic observation of fibroblasts cultured on microgrooved surfaces of bulk …
ET Den Braber, HV Jansen, MJ de Boer, HJE Croes, M Elwenspoek, ...
Journal of biomedical materials research 40 (3), 425-433, 1998
The black silicon method. VIII. A study of the performance of etching silicon using SF6/O2-based chemistry with cryogenical wafer cooling and a high density ICP source
H Jansen, M De Boer, H Wensink, B Kloeck, M Elwenspoek
Microelectronics Journal 32 (9), 769-777, 2001
Miniaturized thermal flow sensor with planar-integrated sensor structures on semicircular surface channels
M Dijkstra, MJ de Boer, JW Berenschot, TSJ Lammerink, RJ Wiegerink, ...
Sensors and Actuators A: Physical 143 (1), 1-6, 2008
Micromachined fountain pen for atomic force microscope-based nanopatterning
S Deladi, NR Tas, JW Berenschot, GJM Krijnen, MJ de Boer, JH De Boer, ...
Applied physics letters 85 (22), 5361-5363, 2004
Carrier transport in mesoscopic silicon-coupled superconducting junctions
WM Van Huffelen, TM Klapwijk, DR Heslinga, MJ De Boer, ...
Physical Review B 47 (9), 5170, 1993
Capillary force lithography: fabrication of functional polymer templates as versatile tools for nanolithography
CM Bruinink, M Péter, PA Maury, M De Boer, L Kuipers, J Huskens, ...
Advanced Functional Materials 16 (12), 1555-1565, 2006
Mining for osteogenic surface topographies: In silico design to in vivo osseo-integration
FFB Hulshof, B Papenburg, A Vasilevich, M Hulsman, Y Zhao, M Levers, ...
Biomaterials 137, 49-60, 2017
Microneedle structure and production method therefor
Y Yeshurun, M Hefetz, M De Boer, JW Berenschot, JGE Gardeniers
US Patent 7,648,484, 2010
Advancements in technology and design of biomimetic flow-sensor arrays
CM Bruinink, RK Jaganatharaja, MJ de Boer, E Berenschot, ML Kolster, ...
2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems …, 2009
Polymer microneedles
Y Yeshurun, M Hefetz, E Berenschot, M De Boer, DM Altpeter, G Boom
US Patent 6,924,087, 2005
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