| Review of advances in cubic boron nitride film synthesis PB Mirkarimi, KF McCarty, DL Medlin Materials Science and Engineering: R: Reports 21 (2), 47-100, 1997 | 864 | 1997 |
| Elastic constants of single‐crystal transition‐metal nitride films measured by line‐focus acoustic microscopy JO Kim, JD Achenbach, PB Mirkarimi, M Shinn, SA Barnett Journal of Applied Physics 72 (5), 1805-1811, 1992 | 397 | 1992 |
| Thick stress-free amorphous-tetrahedral carbon films with hardness near that of diamond TA Friedmann, JP Sullivan, JA Knapp, DR Tallant, DM Follstaedt, ... Applied Physics Letters 71 (26), 3820-3822, 1997 | 392 | 1997 |
| Ion‐assisted pulsed laser deposition of cubic boron nitride films TA Friedmann, PB Mirkarimi, DL Medlin, KF McCarty, EJ Klaus, ... Journal of applied physics 76 (5), 3088-3101, 1994 | 306 | 1994 |
| On the role of ions in the formation of cubic boron nitride films by ion-assisted deposition PB Mirkarimi, KF McCarty, DL Medlin, WG Wolfer, TA Friedmann, ... Journal of materials research 9 (11), 2925-2938, 1994 | 259 | 1994 |
| Enhanced hardness in lattice‐matched single‐crystal TiN/V0.6Nb0.4N superlattices PB Mirkarimi, L Hultman, SA Barnett Applied physics letters 57 (25), 2654-2656, 1990 | 221 | 1990 |
| Multilayer reflective coatings for extreme-ultraviolet lithography C Montcalm, S Bajt, PB Mirkarimi, EA Spiller, FJ Weber, JA Folta Emerging Lithographic Technologies II 3331, 42-51, 1998 | 167 | 1998 |
| The synthesis, characterization, and mechanical properties of thick, ultrahard cubic boron nitride films deposited by ion-assisted sputtering PB Mirkarimi, DL Medlin, KF McCarty, DC Dibble, WM Clift, JA Knapp, ... Journal of applied physics 82 (4), 1617-1625, 1997 | 137 | 1997 |
| Microstructure of cubic boron nitride thin films grown by ion‐assisted pulsed laser deposition DL Medlin, TA Friedmann, PB Mirkarimi, P Rez, MJ Mills, KF McCarty Journal of applied physics 76 (1), 295-303, 1994 | 127 | 1994 |
| Structure and mechanical properties of epitaxial TiN/V0. 3Nb0. 7N (100) superlattices PB Mirkarimi, SA Barnett, KM Hubbard, TR Jervis, L Hultman Journal of materials research 9 (6), 1456-1467, 1994 | 121 | 1994 |
| Practical approach for modeling extreme ultraviolet lithography mask defects EM Gullikson, C Cerjan, DG Stearns, PB Mirkarimi, DW Sweeney Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2002 | 116 | 2002 |
| Substrate-integrated hollow waveguides: a new level of integration in mid-infrared gas sensing A Wilk, JC Carter, M Chrisp, AM Manuel, P Mirkarimi, JB Alameda, ... Analytical chemistry 85 (23), 11205-11210, 2013 | 104 | 2013 |
| High-performance Mo-Si multilayer coatings for extreme-ultraviolet lithography by ion-beam deposition E Spiller, SL Baker, PB Mirkarimi, V Sperry, EM Gullikson, DG Stearns Applied optics 42 (19), 4049-4058, 2003 | 100 | 2003 |
| Characterization of misfit dislocations in epitaxial (001)-oriented TiN, NbN, VN, and (Ti, Nb) N film heterostructures by transmission electron microscopy L Hultman, M Shinn, PB Mirkarimi, SA Barnett Journal of crystal growth 135 (1-2), 309-317, 1994 | 100 | 1994 |
| Growth of cubic BN films on β‐SiC by ion‐assisted pulsed laser deposition PB Mirkarimi, DL Medlin, KF McCarty, JC Barbour Applied physics letters 66 (21), 2813-2815, 1995 | 99 | 1995 |
| Localized defects in multilayer coatings DG Stearns, PB Mirkarimi, E Spiller Thin Solid Films 446 (1), 37-49, 2004 | 97 | 2004 |
| Stress, reflectance, and temporal stability of sputter-deposited Mo/Si and Mo/Be multilayer films for extreme ultraviolet lithography PB Mirkarimi Optical Engineering 38 (7), 1246-1259, 1999 | 88 | 1999 |
| Analysis of residual stress in cubic boron nitride thin films using micromachined cantilever beams GF Cardinale, DG Howitt, KF McCarty, DL Medlin, PB Mirkarimi, ... Diamond and related materials 5 (11), 1295-1302, 1996 | 83 | 1996 |
| Effects of ambient conditions on the adhesion of cubic boron nitride films on silicon substrates GF Cardinale, PB Mirkarimi, KF McCarty, EJ Klaus, DL Medlin, WM Clift, ... Thin Solid Films 253 (1-2), 130-135, 1994 | 80 | 1994 |
| Advances in multilayer reflective coatings for extreme ultraviolet lithography JA Folta, S Bajt, TW Barbee Jr, RF Grabner, PB Mirkarimi, TD Nguyen, ... Emerging Lithographic Technologies III 3676, 702-709, 1999 | 75 | 1999 |
