| Reactive magnetron sputter deposited CNx: Effects of N2 pressure and growth temperature on film composition, bonding, and microstructure WT Zheng, H Sjöström, I Ivanov, KZ Xing, E Broitman, WR Salaneck, ... Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 14 (5 …, 1996 | 208 | 1996 |
| Reactive magnetron sputter deposition of CNx films on Si (001) substrates: film growth, microstructure and mechanical properties H Sjöström, I Ivanov, M Johansson, L Hultman, JE Sundgren, ... Thin Solid Films 246 (1-2), 103-109, 1994 | 112 | 1994 |
| Design, plasma studies, and ion assisted thin film growth in an unbalanced dual target magnetron sputtering system with a solenoid coil C Engström, T Berlind, J Birch, L Hultman, IP Ivanov, SR Kirkpatrick, ... Vacuum 56 (2), 107-113, 2000 | 88 | 2000 |
| Influence of an external axial magnetic field on the plasma characteristics and deposition conditions during direct current planar magnetron sputtering I Ivanov, P Kazansky, L Hultman, I Petrov, JE Sundgren Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 12 (2 …, 1994 | 84 | 1994 |
| Comparison of magnetron sputter deposition conditions in neon, argon, krypton, and xenon discharges I Petrov, I Ivanov, V Orlinov, JE Sundgren Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 11 (5 …, 1993 | 80 | 1993 |
| Electrostatic probe measurements in the glow discharge plasma of a dc magnetron sputtering system I Petrov, V Orlinov, I Ivanov, J Kourtev Contributions to Plasma Physics 28 (2), 157-167, 1988 | 77 | 1988 |
| Reactive magnetron sputter deposited CN {sub {ital x}}: Effects of N {sub 2} pressure and growth temperature on film composition, bonding, and microstructure WT Zheng, H Sjoestroem, I Ivanov, KZ Xing, E Broitman, WR Salaneck, ... Journal of Vacuum Science and Technology, A 14 (5), 1996 | 76 | 1996 |
| RECOGNIZED BY THE EUROPEAN PHYSICAL SOCIETY APPROVED BY THE EUROPEAN COMMISSION KS Adhav, MV Dawande, RB Raut Bulg. J. Phys 37 (2), 090-099, 2010 | 69* | 2010 |
| Stress development during deposition of thin films E Broitman, WT Zheng, H Sjöström, I Ivanov, JE Greene, JE Sundgren Applied physics letters 72 (20), 2532-2534, 1998 | 64 | 1998 |
| Growth of epitaxial 3C‐SiC films on (111) silicon substrates at 850° C by reactive magnetron sputtering Q Wahab, RC Glass, IP Ivanov, J Birch, JE Sundgren, M Willander Journal of applied physics 74 (3), 1663-1669, 1993 | 55 | 1993 |
| Growth and characterization of Na0. 5K0. 5NbO3 thin films on polycrystalline Pt80Ir20 substrates X Wang, S Olafsson, LD Madsen, S Rudner, IP Ivanov, A Grishin, ... Journal of materials research 17 (5), 1183-1191, 2002 | 53 | 2002 |
| Composition, structure, and dielectric tunability of epitaxial thin films grown by radio frequency magnetron sputtering X Wang, U Helmersson, LD Madsen, IP Ivanov, P Münger, S Rudner, ... Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 17 (2 …, 1999 | 52 | 1999 |
| Low‐temperature deposition of cubic BN:C films by unbalanced direct current magnetron sputtering of a B4C target MP Johansson, I Ivanov, L Hultman, EP Münger, A Schütze Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 14 (6 …, 1996 | 52 | 1996 |
| Reactive magnetron sputtering of CNx thin films at different substrate bias WT Zheng, E Broitman, N Hellgren, KZ Xing, I Ivanov, H Sjöström, ... Thin Solid Films 308, 223-227, 1997 | 49 | 1997 |
| Interfacial void formation during vapor phase growth of 3C-SiC on Si (0 0 1) and Si (1 1 1) substrates. Characterization by transmission electron microscopy LO Björketun, L Hultman, IP Ivanov, Q Wahab, JE Sundgren Journal of Crystal growth 182 (3-4), 379-388, 1997 | 48 | 1997 |
| Monolithic and multilayer Cr/CrN, Cr/N, and N/CrN coatings on hard and soft substrates ML Kuruppu, G Negrea, IP Ivanov, SL Rohde Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 16 (3 …, 1998 | 43 | 1998 |
| 3C–SiC/Si/3C–SiC epitaxial trilayer films deposited on Si (111) substrates by reactive magnetron sputtering Q Wahab, L Hultman, IP Ivanov, M Willander, JE Sundgren Journal of materials research 10 (6), 1349-1351, 1995 | 40 | 1995 |
| Electron energy distribution function in a dc magnetron sputtering discharge I Ivanov, S Statev, V Orlinov, R Shkevov Vacuum 43 (8), 837-842, 1992 | 35 | 1992 |
| The growth of V2O5 flash-evaporated films C Julien, JP Guesdon, A Gorenstein, A Khelfa, I Ivanov Journal of materials science letters 14, 934-936, 1995 | 32 | 1995 |
| Comparison of some basic plasma parameters and discharge characteristics of planar magnetron sputtering discharges in argon and neon I Petrov, I Ivanov, V Orlinov, J Kourtev Contributions to Plasma Physics 30 (2), 223-231, 1990 | 26 | 1990 |
