A survey of automated material handling systems in 300-mm SemiconductorFabs GK Agrawal, SS Heragu IEEE transactions on semiconductor manufacturing 19 (1), 112-120, 2006 | 158 | 2006 |
The development of services in customer relationship management (CRM) environment from ‘technology’perspective GK Agrawal, D Berg Journal of Service Science and Management 2 (04), 432, 2009 | 19 | 2009 |
Implementation of hybrid metrology at HVM fab for 20nm and beyond A Vaid, L Subramany, G Iddawela, C Ford, J Allgair, G Agrawal, J Taylor, ... Metrology, Inspection, and Process Control for Microlithography XXVII 8681 …, 2013 | 14 | 2013 |
Technology in the service development process: A missing dimension GK Agrawal, D Berg International Journal of Services Technology and Management 8 (2-3), 107-122, 2007 | 14 | 2007 |
Advanced Process Control (APC) and Real Time Dispatch (RTD) System Integration for Etch Depth Control Process in 300mm Fab GK Agrawal, SY Loh, A Shebi Advanced Semiconductor Manufacturing Conference, 390-394, 2015 | 11 | 2015 |
Role and impact of 'technology' in the service development process: a research study GK Agrawal, D Berg International Journal of Services Technology and Management 9 (2), 103-121, 2008 | 9 | 2008 |
Lithography run-to-run control in high mix manufacturing environment with a dynamic state estimation approach ME Yelverton, GK Agrawal Metrology, Inspection, and Process Control for Microlithography XXVIII 9050 …, 2014 | 6 | 2014 |
The development of services: Role and impact of technology on the service development process GK Agrawal Rensselaer Polytechnic Institute, 2006 | 3 | 2006 |
A Dynamic Run-to-Run control state estimation approach in High Volume Semiconductor Manufacturing environment GK Agrawal, ME Yelverton, T Miller APC Conference XXV, Ann Arbor, MI USA, 2013 | | 2013 |
Implementation of Hybrid Metrology to meet next-generation measurement requirements A Vaid, L Subramany, G Iddawela, J Yan, C Ford, GK Agrawal, C Kang, ... 2nd New York TD Technology Forum, 2013 | | 2013 |
Deploying Advanced Process Control Enterprise Wide as an Integral Part of a Semiconductor Manufacturing System ME Yelverton, K Chamness, GK Agrawal Applied Materials Technology Forum: Global Automation, Austin, TX USA, 2008 | | 2008 |
View Point: Cars Tap Wireless, Memory Technologies for Improved Safety GK Agrawal electronic design, 2008 | | 2008 |
Predictive and Preventative Maintenance Equipment Capabilities GK Agrawal ISMI 2nd International Predictive and Preventative Maintenance Workshop, San …, 2008 | | 2008 |
Recursive analysis approach in Virtual Metrology GK Agrawal 9th European AEC/APC Conference, Tel Aviv, Israel, 2008 | | 2008 |
Predictive and Preventative Maintenance GK Agrawal ISMI Manufacturing Methods Council (MMC) - Tool Qualification: Fab …, 2007 | | 2007 |